xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 235 Strasbaugh Time: 11:57:36
Parent: 224036 7AF,ASSY,PANEL, WAFER HANDLING
Drawing: 7AF-224036A1 Rev: F
Type: ASSY-SUB Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
107758 1.00 EA TERM.,OUTPUT INDICATOR D K4LD CS-ELEC
107760 3.00 EA TERM.,WEIDMULLER,DK4PA CS-ELEC
107761 2.75 IN TERM ASSY RAIL,TS32, CS-ELEC N/A
107762 2.00 EA TERM BLK,END BRKT., WEIDMULER CS-ELEC N/A
107763 1.00 EA TERM.,END SECT. 3592.6 CS-ELEC N/A
107764 1.00 EA TERM,JUMPER FOR DK4 & AK Z4 CS-ELEC N/A 11/17/98
110803 1.00 EA REGULATOR,14R113F PAR ER CS-ELEC
110807 1.00 EA REGULATOR BRACKET, 18-025-003 CS-MISC
111577 1.00 EA FTG,NYL,ELB,1/8TBG,1/8NP T CS-FTG-E 04/23/98
111580 2.00 EA FTG,NYL,ELB,10-32UNF, 1/8TBG CS-FTG-E N/A 04/23/98
111580 3.00 EA FTG,NYL,ELB,10-32UNF, 1/8TBG CS-FTG-E N/A 04/22/98
111604 1.00 EA FTG,NYL,REDUCER 1/4 NPT X 10-32 UN CS-FTG-E 04/23/98
111952 1.00 EA FTG,SS,STELB,1/8FNPT, 1/8MNPT CS-FTG
112711 2.00 EA SCREW,8-32x1/4,RHMS,PLTD CS-HDW-E
113977 2.00 EA WSHR,AS,LOCK,EXT,#8 CS-HDW-E
218047 1.00 EA FTG,TEF,HX NIP,1/4NPT CS-FTG
218771 1.00 EA FTG,TEF,REDNIP,1/2MNPT,1 /4MNPT CS-FTG
218821 1.00 EA VLV,SOL 2WAY TEF,#442 2DFSHEP TE CS-ELEC 09/12/95
218955 1.00 EA FTG,TEF,F TEE,1/2NPT CS-FTG
218971 1.00 EA FTG,TEF,STR.ELB.,1/4F X 1/4M CS-FTG
219626 1.00 EA VLV,NDL,TEF > CS-ELEC
220730 2.00 EA FTG,TEF,ELB,1/2TBG,1/2MN PT CS-FTG
222135 1.00 EA 7AF,FLUIDIC SUBPANEL FAB-SHMT 7AF-222135D1
224189 4.00 EA FTG,SS,M,ELBOW,1/4T,X,1/ 8MNPT ONE CS-FTG 04/23/98
224189 1.00 EA FTG,SS,M,ELBOW,1/4T,X,1/ 8MNPT ONE CS-FTG 04/22/98
224192 2.00 EA FTG,SS,BRCH,TEE,1/4T,X,1 /4MNPT ONE CS-FTG 12/01/98
224192 3.00 EA FTG,SS,BRCH,TEE,1/4T,X,1 /4MNPT ONE CS-FTG 11/30/98
224196 4.00 EA FTG,SS,M ELBOW,1/4T X 1/ 4MNPT ONE CS-FTG 04/23/98
224198 2.00 EA FTG,SS,BRCH,TEE,1/4T,X,1 /8MNPT ONE CS-FTG
224205 1.00 EA GAUGE,100PSI,1-1/2" DIAL 1/8NPT,REA CS-MECH
224338 1.00 EA FTG,POLYPRO,RED.BSHG, 1/4 MT X 1 CS-FTG-E 04/23/98
226550 1.00 EA NUT,PANEL,P78652 PARKER CS-MISC
239014 1.00 EA VLV,SOL,TEF,2 WAY,N.C., 1/4FNPT,24 CS-MISC
284574 1.00 EA REGULATOR,AIR W/BRK & GA UGE 7-100P CS-ELEC
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