Strasbaugh nTellect (Model 7AF) Wafer Grinder
4 - 6 Version 1.2 - June 2004
LEFT/RIGHT DIGITAL MEASUREMENT PROBES
The left and right digital measurement probes function as in process contact gauges to
reduce variation in wafer thickness. Vacuum retractable, each uses a linear encoder to
monitor positioning. The rubber boot provides water resistance. The probes are
mounted on support arms through which power cables and vacuum tubes are run.
LEFT/RIGHT CONDITIONING ARMS
Each conditioning arm stone assembly consists of a circular rotating stone brush which
applies down force on the ceramic work chuck, cleaning the chuck between grindings.
To prevent damage to the chuck, the force applied is equal only to the weight of the
stone assembly. An air motor rotates the stone brush, and at the end of the
conditioning cycle the arm parks itself off to the side within the grinding pan.
Switches on the assembly indicate whether the brush is parked or engaged.
The following is the conditioning arm sequence of movements:
• A pneumatic cylinder moves the arm assembly shaft up, causing the entire
assembly to move the conditioning stone brush from park height to the required
height for moving to engage position.
• A rotary actuator moves the arm to engage position (a sensor indicates position).
• A secondary cylinder lowers the arm, moving it down over the work chuck to the
required height for conditioning.
• An air motor rotates the stone brush.
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