Strasbaugh nTellect (Model 7AF) Wafer Grinder
7 - 4 Version 1.2 - June 2004
CLEAN DRY AIR SYSTEM
Refer to the engineering drawings labeled 118168P_ (pneumatic) and the Pneumatic
Adjustments chapter of this manual for details on air use and related valve panels.
The inhouse clean dry air supply must be a minimum of 100 PSI for proper operation
of all machine functions. The inhouse air supply enters from the rear of the machine
through a ball valve, filter, regulator, and coalescing filter. These four parts are
grouped together inline and located inside door 21. The 7AF has three sets of air
filters, the main incoming air filter and two additional sets of filters in parallel for the
air bearing spindles.
From the coalescing filter, the clean dry air supply is plumbed to a distribution
manifold mounted at the bottom of the machine inside
door 21. From the distribution manifold connection is made to a second manifold,
located inside door 10, which serves the wafer handling section of the machine.
All pneumatic lines are identified with banded identification tags at the termination
points. These identification marks are encircled on the engineering drawings.
Special Notes:
• Nitrogen may be substituted for clean dry air.
• The pressure dew point should not exceed 45° Fahrenheit.
• Care should be taken to ensure that all air supply lines are thoroughly purged
before connection to the spindle.
CAUTION: TEFLON TAPE MUST NEVER BE USED ON CONNECTIONS
DOWNSTREAM OF THE FILTERS!
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