Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 2 Version 1.2 - June 2004
OPERATOR FUNCTIONS
Overview 4
Menus Used in Basic Operation 6
Menu Tree 6
Main Menu 7
Home Machine Menu 9
Grind Cycle Menu 15
Dress Cycle Menu 19
Auto Grind Cycle Sequence 23
Event Sequence 24
Basic Operation 26
Summary 26
Problems and Error Messages 26
1 - Powering Up 27
2 - Homing the Machine 30
Check for Obstructions and Display the Home Machine menu 31
Home the Machine Automatically 32
Home Individual Servos Manually 34
3 - Checking Utilities 36
4 - Referencing the Chucks 37
5 - Running an Automatic Grind Cycle 42
Display the Grind Cycle menu 43
Select the Desired Recipe and Grind 43
Compare the Stored Recipe Values with the Parameter Values Received from the Process Supervisor 45
Prepare the Cassettes and Start the Cycle 47
While the Cycle Is Running, Monitor the Status Screen Display Values 49
If There’s a Problem, Pause (Interrupt) or Stop (Cancel) the Cycle 51
When the Last Wafer Has Been Processed 52
Truing and Dressing the Grind Wheels and Work Chucks 53
Display the Dress Cycle Menu 54
Grind Wheel Dressing and Truing 57
Select the Wheel and the Treatment Desired 57
Compare the Stored Recipe Values with the Parameter Values Received from the Process Supervisor 58
Start the Cycle 60
While the Cycle Is Running, Monitor the Status Screen Display Values 61
If There's a Problem, Stop (Cancel) the Cycle 62
When the Start Cycle and Stop Cycle Buttons Begin to Flash 62
Chuck Dressing and Truing 63
Select the Chuck and the Treatment Desired 63
Compare the Stored Recipe Values with the Parameter Values Received from the Process Supervisor 64
Start the Cycle 65
While the Cycle Is Running, Monitor the Status Screen Display Values 66
If There’s a Problem, Stop (Cancel) the Cycle 67
When the Start Cycle and Stop Cycle Buttons Begin to Flash 67
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