Strasbaugh nTellect 7AF - Page 1364

xxfsassy.p c+ 4.3.9 Field Service Assy BOM Date:
06/25/03
Page: 179 Strasbaugh Time:
16:08:31
Parent: 304591 7AF,RETROFIT KIT,SQUARE WAFER ALIGNMENT >
Drawing: 7AF-118168E0 Rev:
Type: KIT-UPGD Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
111395 2.00 EA O-RING,BUNA,.103Wx.549ID ,-113,70A CS-HDW-E N/A 10/27/98
111400 4.00 EA O-RING,BUNA,.103W X 1.04 9ID,-121,7 CS-HDW-E 10/27/98
223275 2.00 EA 7AF,NOZZLE,CENTERING, 3/4 DIA FAB-MACH 7AF-223275D1 10/27/98
284580 2.00 EA 7AF,WORK CHUCK,CER,> 4.5 SQR,25 CS-MISC 7AF-284580D1 10/27/98
304506 0.00 EA 7AF,CONTR,ROBOT/ > 6-0000-277 CS-ELEC NO DWG 10/27/98 11/04/98