7AF Back Grinder
Flag Labels
Tue Aug 17, 2004 10:59 AM Flag Labels - Page 2
No. Label No. Label No. Label No. Label
108 PreAligner
Controllr Error
109 Equipe Comm
Error
110 Robot Comm
Error
111 Aligner Comm
Error
112 Aligner vacuum 113 Aligner Vacuum
Switch
114 Aligner Homed 115 Aligner Running
Macro
116 Aligner Moving 117 Aligner Servo
Error
118 ALIGNMENT
ERROR !!!!!!!!!
119 Send Robot
Command
120 Toggle Robot
Vacuum On/Off
121 Toggle Aligner
Vacuum On/Off
122 Robot Done
No Wafer 1000H
123 Robot Done
Has Wafer 100CH
124 Robot Macro Run
No Wafer 1100H
125 Robot Macro Run
Has Wafer 110CH
126 Aligner Idle OK
Status = 1008H
127 Aligner Done
Has Wafer 1004H
128 Req Scan Send 2 129 Req Scan Send 1 130 Req Scan Rec 1 131 Req Scan Rec 2
132 Aligner Error
Retry OK 1084H
133 Pre-Aligner
Bypass
134 Warn CleanChuck
About to Begin
135 Rec 1 Active
136 Robot Moving 137 Rec 2 Active 138 Robot Homed 139 Robot Scan Cycl
140 Robot Auto Cycl 141 Send 2 Active 142 Send 1 Active 143 Robot Running
Macro
144 LT Work Chuck
Wafer Placed
145 LT Work Chuck
Req UnLoad
146 LT Work Chuck
Req Load
147 GrindCycle Idle
CleanChucks Now
148 RT Work Chuck
Wafer Placed
149 RT Work Chuck
Req UnLoad
150 RT Work Chuck
Req Load
151 Pre-Aligner
Wafer Placed
152 Hope to Set
Send1 Active
153 Hope to Set
Send2 Active
154 Spin Station
Wafer Placed
155 Spin Station
Request Unload
156 Wafer in bottom
slot not allowd
157 Robot chuck has
wafer present
158 In-situ Dress 159 Abort Grind
160 Use Right Chuck 161 Use Left Chuck 162 Halt Cycle 163 Cross Slotted
Wafer
164 Coarse Force
Grinding
165 Fine Force
Grinding
166 Coarse Wafer
Thickness Alarm
167 Fine Wafer
Thickness Alarm
168 Waiting for
Send Cassette
169 Waiting for
Recv Cassette
170 Red Flashing
Mach Status
171 Red Steady
Mach Status
172 Yellow Flashing
Mach Status
173 Yellow Steady
Mach Status
174 Green Flashing
Mach Status
175 Green Steady
Mach Status
176 Panel Interlock
Grind Abort
177 Left Chuck Vac
Grind Abort
178 Right Chuck Vac
Grind Abort
179 Wafer Diameter
Is Invalid
180 Left Chuck
Request Home
181 Left Chuck
Homed
182 Right Chuck
Request Home
183 Right Chuck
Homed
184 Spin Station
Request Home
185 Spin Station
Homed
186 Rotational Home
Error Spin Stn
187 Spin Stn Vacuum
Out of Bounds
188 Rotational Home
Error LT Chuck
189 Rotational Home
Error RT Chuck
190 Reqest Robot
Home Routine
191 Stop Robot
192 Request Aligner
Home Routine
193 Timed LT Grind
Seal Vac Error
194 Timed RT Grind
Seal Vac Error
195 RCSI A,10 is 1
196 Run Flowchart
MinorFlat Align
200 Req Flip Send 1 201 Req Flip Send 2 202 Req Flip Recv 2
203 Req Flip Recv 1 204 Turret State
Undefined
205 LT Work Chuck
DI Coolant Flag
206 RT Work Chuck
DI Coolant Flag
207 LT Work Chuck
DI CoolantAlarm
208 RT Work Chuck
DI CoolantAlarm
209 Left Probe
Timed Out
210 Right Probe
Timed Out
211 Left Chuck Vac
Error
212 Right Chuck Vac
Error
213 Spin Stn Vac
Timed Out
214 Left Condition
Arm Timed Out
215 Right Condition
Arm Timed Out
216 Pre-Aligner Vac
Timed Out
217 Robot Vacuum
Timed Out
218 Spin Stn Lid
Timed Out
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