Strasbaugh nTellect 7AF - Page 1381

7AF Back Grinder
Number Labels
Tue Aug 17, 2004 10:59 AM Number Labels - Page 1
No. Label No. Label No. Label No. Label
1 # wafers req'd
to start cycle
2 Grind/Ref Cycle
Wafer Diameter
3 Scanned This
Wafer Diameter
18 Condition Chuck
Options
19 Special Options 21 Bridge Offset
Counter
38 Robot & Aligner
Reset Timeout
42 Dry Finished
Wafr Left Chuck
43 Rinse Finished
Wafr Left Chuck
44 Dry Finished
Wfr Right Chuck
45 Spin Station
Lid Options
46 Rinse Finished
Wfr Right Chuck
47 Grind Seal
Sensors (0=NO)
48 Dual Fine Grind
+ 2-Sided Grind
49 Strasbaugh Lab
7AF #1
50 Reference Wafer
51 Coarse
Deadweight lbs
52 Fine
Deadweight lbs
53 Password Needed 54 CZ Dwell lbs
55 FZ Dwell lbs 56 FZ Grind Force
Hystr lbs
57 FZ Max Grind
Force lbs
58 COARSE Wheel
Grind Cycle RPM
59 FINE Wheel
Grind Cycle RPM
60 Coarsgrnd Chuck
Cycle Step1 RPM
61 Finegrind Chuck
Cycle Step1 RPM
62 LT Work Chuck
Condition RPM
63 LT Work Chuck
Condition SECS
64 LT Work Chuck
Rinse RPM
65 LT Work Chuck
Rinse SECS
66 LT Offset +/-10
micron
67 Exhaust Monitor 68 RT Work Chuck
Condition RPM
69 RT Work Chuck
Condition SECS
70 RT Work Chuck
Rinse RPM
71 RT Work Chuck
Rinse SECS
72 RT Offset +/-10
micron
73 Polish Removal
Limit
74 Fine Force
Timeout
75 Coarse Force
Timeout
76 Spin Station
Clean RPM
77 Spin Station
Clean SECS
78 Spin Station
Dry RPM
79 Spin Station
Dry SECS
80 Cassette Pitch
inches
81 Wafers per
Cassette
82 no longer used
83 no longer used 84 no longer used 85 Robot Controllr
Model #
86 In Situ Dress
Freq
87 Bridge Lube
Timer minutes
88 LT Work Chuck
Min DI Coolant
89 RT Work Chuck
Min DI Coolant
90 LT Work Chuck
Min Vacuum
91 RT Work Chuck
Min Vacuum
92 Spin Station
Min Vacuum
99 Work Chuck DI
Coolant Timers
100 Work Chuck DI
Coolant TempVal
101 Work Chuck DI
Coolant Timer 1
102 Work Chuck DI
Coolant Timer 2
103 Work Chuck DI
Coolant Timer 3
104 Work Chuck DI
Coolant Timer 4
105 Ref Probe BEFOR
Condition Chuck
106 Clean Chuck Use
Vacuum to Dry
107 Clean LC Use
Bkflush/Blowoff
108 Clean RC Use
Bkflush/Blowoff
109 Allow Low Work
Chuck Vacuum
110 Prevent Aligner
Error 1084,1088
111 Wafers per Cass
minus 1
112 Use Spin Stn
Air Blower
113 Spin Stn Lid Up
Between Wafers
114 This 7AF Tests
Drain Failure
115 This 7AF Tests
Exhaust Failure
116 Timed Drain
Failure
117 This 7AF Tests
Reserve PSI
118 Rinse or Dry
Wafer on RChuck
119 Rotational Home
Choice LT Chuck
120 Rotational Home
Choice RT Chuck
121 Never Use Probe
During Grind
122 Dual Fine Grind
0,1,2
123 Rinse or Dry
Wafer on LChuck
124 LC Vac Timer
Reset Value
125 RC Vac Timer
Reset Value
126 LC Seal Up For
Spin Wafer Dry
127 RC Seal Up For
Spin Wafer Dry
160 Total Wafers
Auto Ground
190 LT Chuck High
Vac with Wafer
191 RT Chuck High
Vac with Wafer
192 Spin High Vac
with Wafer
193 LT Chuck Low
Vac No Wafer
194 RT Chuck Low
Vac No Wafer
195 Spin Low Vac
No Wafer