Strasbaugh Universal Vacuum System
Page 12 Version 1.2—March 2004
WASTE DISPOSAL
For all chemicals used with Strasbaugh machines:
• Be aware of any personnel safety hazards. See chemical suppliers’ material safety data
sheets (MSDS).
• Be aware of local, state, and federal regulations regarding waste disposal. Consult with your
supervisor or Safety Officer if there is any question.
DECONTAMINATION AND
DECOMMISSION
At the end of the machine’s service life, it should be decontaminated in accordance with
SEMI standard S12-0298, dismantled and recycled in an appropriate manner. Any
hazardous materials used in or around the machine over the life of the UVS will determine
the extent of decontamination that may be necessary.
Any chemical residues that might exist should be neutralized and disposed of in accordance
with local regulations.
SEISMIC PROTECTION
Once the Universal Vacuum System has been properly leveled, the machine can be tied
down for seismic protection. Install appropriate tie down mounts per facility requirements.
The UVS user must supply the necessary hardware to attach the machine to the flooring.
The user is responsible for how the machine is to be secured at the user’s site. When
selecting a method for attaching the machine, the fastening hardware must be able to
withstand the following forces:
Force Specifications
Lateral Force
282 pounds (128.2 kg) overall for whole machine
Overturning Force
(vertical tensional force on
fastener)
172 pounds (78.2 kg) at each of the four anchor points on the
machine
Refer to Engineering Drawing 289000U2 for the dimensions of the anchor points.
To Next Page
