Strasbaugh nTellect 7AF - Page 1439

STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 vii
Strasbaugh Confidential
vii
2. List of Illustrations
FIGURE 1 COMMUNICATION FINITE STATE DIAGRAM......................................................................................... 5-2
FIGURE 2 EQUIPMENT CONTROL STATE DIAGRAM............................................................................................. 5-6
FIGURE 3 E10 STATE DIAGRAM........................................................................................................................5-11
FIGURE 4 7AF EQUIPMENT PROCESS STATES .................................................................................................5-14
FIGURE 5 INPUT CASSETTE STATE DIAGRAM ....................................................................................................5-27
FIGURE 6 OUTPUT CASSETTE STATE DIAGRAM.................................................................................................5-28
FIGURE 7 SPOOLING STATE DIAGRAM ..............................................................................................................5-34