Strasbaugh nTellect 7AF - Page 145

Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 13
Component or
Function Position or Status
BRIDGE
Present location of the bridge as measured in inches from its
right side (home) position.
Wheel Coarse Fine
Height Coarse spindle height above
the work chuck after
referencing, measured in
microns.
Fine spindle height above the
work chuck after referencing,
measured in microns.
Speed Coarse spindle speed in
revolutions per minute.
Fine spindle speed in
revolutions per minute.
Motor Coarse spindle motor current
in amps.
Fine spindle motor current in
amps.
Force Amount of force in pounds
being applied to the wafer by
the coarse spindle.
Amount of force in pounds
being applied to the wafer by
the fine spindle.
Chuck Left Right
Probe Left probe measurement in
microns.
Right probe measurement in
microns.
Speed Left chuck speed in revolutions
per minute.
Right chuck speed in
revolutions per minute.
Vacuum Left chuck vacuum in inches
of mercury.
Right chuck vacuum in inches
of mercury.
Coolant Left chuck coolant flow in
gallons per minute.
Right chuck coolant flow in
gallons per minute.