STRASBAUGH, INC.
5-18 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
5.4.5 Event Reports
The 7AF has a fixed set of Events which can occur. Each Event is identified by a unique Collection Event ID (CEID).
The CEIDs which exist are shown in "Appendix B -- Collection Events".
When an Event occurs, the Equipment sends the appropriate S6F11 Event Report message to the Host (if that particular
event has been enabled). Event Reports are defined by the Host (S2F33) and linked to a specific CEID (S2F35).
The Equipment allows the Host to enable and disable Event Reports using S2F37. If the Host enables a CEID, for which
no Event Report is defined, the Equipment will send a "null" (no data) report when the event occurs.
The Host can "force" Event Reports on the Equipment using the following Event Report Request messages:
S6F15 Host Requests an Event Report associated with a CEID.
S6F17 Host requests an Annotated Event Report associated with a CEID.
S6F19 Host requests an Event Report associated with a Report ID.
S6F21 Host requests an Annotated Event Report associated with a Report ID.
5.4.6 Time Driven Trace
The 7AF supports Time Driven Trace initiated from the Host. The Host initializes a trace using S2F23. The Equipment
will send the data requested after the specified time interval has expired. The data will be sent using the S6F1 (Trace Data
Send) message.
The Equipment can handle several concurrent traces. The number of concurrent traces is determined by the size of the
trace data requested. The Equipment can support at least four concurrent traces to a maximum size (i.e. all variables
requested).
The equipment allows Host definition of trace data to exceed the one-block limit when reported. That is, the SEMI E5
standard states that the S6F1 (Trace Data Send) message is limited to a single SECS block; but the Equipment will allow
this point to be overlooked at the Host's request. If the Host does define trace data to be larger than one SECS block, then
the Equipment will send the multiple blocks, not preceded by the S6F5/S6F6 Inquire/Grant scenario.
5.4.7 Disk Files
The 7AF maintains a disk file which contains the current Equipment Constant settings. The file is updated each time the
Operator or Host changes an Equipment Constant. The most recent settings for some of the Equipment Constants are read
from the file when the Equipment is powered-on.
All Event Report definitions, links, and enable status are also maintained on separate disk files.
5.4.8 Compatibility
The 7AF supports the following Event Report message formats for non-GEM Host implementations (see "3.7.2 Gem
Configuration").
S6F3/S6F4
S6F9/S6F10
S6F13/S6F14
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