STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-21
Strasbaugh Confidential
5-21
Table 18 Recipe File Categorization
File Name Extension Recipe Description
Any .wfr Wafer
“Coarse” .cwd Coarse Wheel Dress
“Fine” .fwd Fine Wheel Dress
“Chuck” .wcd Chuck Grind
The Equipment Operator may modify any one of the Process Programs stored on the Equipment. The host will be notified
via the PPCHANGEEVENT (CEID 5001) Collection Event if the Operator creates, changes, or deletes a Process
Program. The Equipment Operator can also select a PPID to be uploaded to the Host (S7F3), or download from the Host
(S7F5).
5.6.2 Host Management of Process Programs
Process Programs are saved to disk on the equipment. Process Programs are typically created and updated at the 7AF.
However, the 7AF provides complete facilities for the Host to manage the storage and use of Process Programs. This
allows the 7AF to operate cooperatively with Host-implemented systems. The Host has the following capabilities:
The Host can upload a Process Program from the 7AF Library by using S7F5 (Process Program Request). The equipment
operator can also initiate a Process Program Upload through the 7AF's user interface.
The Host can download a Process Program to the 7AF library by using S7F3 (Process Program Send). The Host may send
S7F1 (Multi-block Inquire) to the equipment before sending a multi-block Process Program. The equipment operator can
also initiate a Process Program Download through the 7AF's user interface.
The Host can delete one or more Process Programs from the 7AF library by using S7F17 (Process Program Delete).
The Host can determine which Process Programs are currently stored in the 7AF library by using S7F19 (Process Program
Directory).
5.6.3 Related Variables
The following table lists the variables (SV's, EC's, or DVVALS) which are relevant to process program management. For
a more complete description of these variables, see "Appendix A -- Variables".
Table 19 Process Program Related Variables
Variable Name VID
PPCHANGENAME 239
PPEXECNAME 26
PPCHANGESTATUS 240
5.6.4 Related Events
The following lists the collection events (CEIDs) which are relevant to process program management. For a more
complete description of these events, see "Appendix B -- Collection Events" or the description in this chapter.
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