Strasbaugh nTellect 7AF - Page 1477

STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-27
Strasbaugh Confidential
5-27
Input Cassette States
Cassette
Present
Cassette
Not
Present
2
1
Figure 5 Input Cassette State Diagram