STRASBAUGH, INC.
8-2 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
15 SV U1 I
PROCESSSTATE: Process State
Value Meaning
0 Main Screen - (Idle)
1 Home Screen - (Idle)
2 Grind Screen - Wait for Start
3 Grind Screen - Wait for Quit Screen
4 Dress Screen - Wait for Start
5 Dress Screen - Wait for Quit Screen
6 Edit Screen
7 Maintenance Screens
8 Data Screen
9 Start wafer grind cycle - Start & Auto Grind Screen
10 Referencing - Home Screen and Request Ref.
11 Homing - Home Screen and at least 1 home request
12 Dress fine wheel
13 True fine wheel
14 Dress coarse wheel
15 True coarse wheel
16 Dress left chuck
17 True left chuck
18 Dress right chuck
19 True right chuck
20 Stopping grind cycle (All - wafer, dress, true)
21 Halt grinding - Wait to continue or stop
16 SV U1 I
PREVIOUSEQUIPMENTSTATE: Previous Equipment State (See
Equipment State)
17 SV U1 I
EQUIPMENTSTATE: Equipment State
Value Meaning
1 Unacknowledged Fault Condition - Red Flashing Light, Alarm
2 Acknowledged Fault, State Set Locally - Red Steady Light, not
capable
3 Unacknowledged Machine Needs Assistance - Yellow Flashing
Light, Alarm
4 Acknowledged Machine Needs Assistance - Yellow Steady
Light
5 Standby - Green Flashing Light, capable, not productive
6 Productive - Green Steady Light
18 SV A[20] I
PREVIOUSCOMMAND: Previous Command, last command issued
19 SV F4 I
WATERTEMPERATURE: Water Temperature, in degrees Celsius
Servo and Subsystem Status
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