STRASBAUGH, INC.
7AF SECS / GEM Interface, Ver 1.5 February 19, 2002 12-1
Strasbaugh Confidential
12. Appendix E -- Document Change History
The following is a list of the changes to this document by version number.
Document
Version
7AF
Version
XXXGEM
Version
Section Effected
Pages
Description
1.0 3.05 000033 All Initial Release
1.1 4.01 000034 5.7 5-24/5-
26
Corrected remote commands BEGIN-AUTO and
GRIND-TYPE to be S2F41
6.26 6-10 Additional return codes for S2F24
6.83 6-34 Corrected data type for LENGTH from “U4” to
“U2”
8.0 8-9 Added definition for VID 139
COARSEWHEELWEAR and VID 140
FINEWHEELWEAR.
10.0 10-2 Added definitions of alarms 47-51
11.0 11-1 Corrected data type for LENGTH from “U4” to
“U2”.
1.2 4.04 000035 10 10-1 /
10-2
Re-defined the alarm label for Alarm 48, defined
Alarms 52 - 62
1.3 5.00 000037 3 3-1/3-4,
3-9/3-10
Updated the references to SEMI standards
supported and the GEM Compliance statement;
added section 3.10 describing how to modify
Equipment Constants from the 7AF console.
5.7.1.8 5-23/5-
24
Corrected the format of the BEGIN-AUTO
remote command
5.13 5-37/5-
40
Added section describing Limits Monitoring
6.20 6-7/6-8 Added definition of EAC = 0x02 (Busy, Denied)
6.22,
6.31,
6.61
6-7/6-42 Modified definitions to include the new 16-byte
time format.
8.0 8-1/8-12 Expanded definition of VID 21,
SERVOSTATUSB; redefined VID’s 19, 119-
132, 139 and 140 as Status Variables; added new
VID’s 141, 142, and 259-261; added definition
to VID 243, TIME.
9.0 9-1/9-2 Defined new collection events 2000-2016
10.0 10-1/10-
2
Added new alarms 63-66, renamed alarms 7-12,
36, 46, and 48-51.
1.4 5.02 00038 - - Updated to reflect the latest build version,
000038 (rebuilt with updated GEM library files
to eliminate a possible memory leak problem).
1.5 5.03 00040 8.0 8-9/8-13 Defined new VID’s 143-156 as Status Variables
used for wafer tracking
9.0 9-1/9-4 Defined new collection event 77.
10.0 10-1/10-
2
Re-labeled the alarm text for Alarms 17, 18, 26
and 33.
1.6 5.04 000043 5.7.1.9 5-23/5-
24
Corrected the SML format of the GRIND-TYPE
command.
10.0
Define alarms 67-80.
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