Atmospheric Pre-aligner Manual
4000-0015 Rev 1
50
The remaining display items are defined as follows:
CCD
ccccc
Scanning range in CCD pixels, from 36 (no wafer on the
chuck) to 2720 (wafer completely covers the CCD). Note: For
models built before October 1998, the numbers may be
different.
ANGLE
aaaaa
Chuck position in encoder counts from 0 to 65,536. By
turning the chuck, the chuck position can be increased or
decreased.
N
N
Number of the working CCDs.
E and R Error [E] and the Reset [R] indicate errors. When there is a
communication error between the pre-aligner and the
controller, the E is 1, not 0. If R = 1, press R to reset.
To verify that the CCD is working, try the following tests. At any time
during your tests, you can press R to reset the pre-aligner or press S to
toggle the Servo on or off.
1. Manually turn the chuck. The chuck position or angle should increase
as you turn the chuck clockwise and decrease as you turn the chuck
counterclockwise.
2. Place a wafer on the chuck so that the chuck is completely covered.
Slowly move the wafer off the chuck. As you move the wafer, the
ccccc number should decrease. Make sure the CCD number increases
as you gradually cover the CCD.
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