Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
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is saved in temporary RAM storage. When you use the SAV command,
the changes are transferred to NVSRAM.
Galil Motion Control Boards
The Galil motion control board provides all motion control signals to the
amplifier module and continuously monitors encoder feedback and limit
sensor status from the servo motors through the signal cable.
The motion control board receives motion commands from the CPU and
generates motion profile signals and sends them to the amplifier module.
One Galil board is required for the robot. If your system has a pre-aligner
and track, there is a second Galil board.
Robot I/O Board
The robot I/O board provides an interface between the robot and the
controller.
There are 16 user I/Os, 8 input and 8 output, that can be configured for the
tool application for the Version 2 Robot I/O Board. The Version 3 Robot
I/O Board has an optional SCSI connector with 68 configurable I/O lines.
Port H and Port D are programmable input and output ports, respectively,
with corresponding pins on the external connector. These programmable
inputs and outputs provide an optional hardware interface for the host
machine. In addition to the eight programmable inputs there are three
hard-coded input pins for STOP, EMS/MOFF and RESet. All inputs and
outputs are normally high and active low.
Pre-aligner I/O Board
If your system has a pre-aligner, the pre-aligner I/O board is the interface
between the CPU board and the CCD arrays located in the pre-aligner.
During wafer centering and alignment, the appropriate CCD array
monitors the wafer edge as the wafer is rotated. This data is sent to the
pre-aligner I/O board through the data cable, then sent to the CPU for
processing.
Robot and Pre-aligner Amplifier Boards
The amplifier boards receive and amplify the signals from the Galil board
and provide current to the corresponding servo motors. The amount and
polarity of the current depends on the speed and acceleration values as
well as the direction required.
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