Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
104
False -positive
signal generated
by limit switch
Bits 4,
5, and
10
Send RLS to determine
which axis. Replace
limit switch assembly.
Axis stops when
it comes in
contact with an
object, such as a
wafer
Mechanical
friction is too
high
Bits 4
and 10
Check all transmissions
along the axis. Make
sure belts are not too
tight and bearings move
smoothly.
Robot stops
when it comes
in contact with
an object, such
as a wafer
Excessive
electrostatic
discharge or
EMI/RFI to
robot
Bit 14 Re-route each-grounding
and proper shielding.
Robot hits the
object
Bits 4
and 10
Re-teach robot.
Robot not
repeatable
Axis position
drifting over
time
Worn-out belts Inspect belts, and replace
if necessary.
Loose
transmission
shaft
Inspect shaft by rotating
pulley manually while
servo is on.
Bad Encoder Use oscilloscope to test
the Encoder output
signal .
Axis position
slightly different
from the last
time stations
were taught.
The difference
is consistent
from one station
to another.
Slipped belt(s) Inspect belts for loose
adjustment. Perform
Diagnostic Step 8 to
ensure the distance from
the home switch and
encoder index is within
the allowable range. For
the R-axis, also perform
Step 9 to re-calibrate the
Home offset. Then re-
teach the stations.
Encoder index
set too close to
home switch
Reset index.
Axis position
different after
every HOME
sequence
Intermittent
limit switch
problem
Bit 5 Send RLS to determine
which axis. Replace
limit switch assembly.
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