Strasbaugh nTellect 7AF - Page 2458

Vacuum Robot Manual
4000-0315 Rev 1
69
Axis moves but
stops at its
negative hard
stop and loses
servo
Limit switch is
not working
Bits 4
and 10
Perform diagnostics step
#4 to determine the
failing limit switch.
Replace limit switch
assembly. If problem
persists, replace flex-
PCB.
Servo motor is
too weak and
ER value is too
small.
Bits 4
and 10
Check servo ER
parameter and increase
the value.
Axis moves but
stops at random
position and
loses servo
Mechanical
friction is too
high
Bits 4
and 10
Check all transmissions
along the axis. Make
sure bearings move
smoothly. Call your
Technical Support
Engineer if you suspect
incorrect belt tension.
Axis cannnot
HOME
Axis does not
move at all
Positive and
Home switches
are active all the
time
Bits 5
and 9
Send RLS to determine
which axis. Replace
limit switch assembly.
Axis stops at
random position
and loses servo
Speed is too fast
or error limit
setup too slow
Bits 4
and 10
Increase error limit setup
Excessive
electrostatic
discharge or
EMI/RFI to
robot
Bit 14 Re-route each-grounding
and proper shielding.
Robot stops
during normal
operation
Robot stops
when it comes
in contact with
an object, such
as a wafer
Robot hits the
object
Bits 4
and 10
Verify station
coordinates and re-teach
robot if necessary.
Worn-out belts Call your Technical
Support Engineer for
advice on belt wear.
Loose
transmission
shaft
Inspect shaft by rotating
pulley manually while
servo is on. If loose,
contact your Technical
Support Engineer.
Robot not
repeatable
Axis position
drifting over
time
Bad Encoder Use oscilloscope to test
the Encoder output
signal .