Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 79
IV. ALIGN THE PRE-ALIGNER WITH THE ROBOT
Tools Required
• four small stock pieces to be used as shims (for example, washers)
• test wafer
Confirm that Compressed Air Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
Confirm that Power Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
Confirm that Vacuum Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
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