Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 130 Version 1.2 - June 2004
g. Disconnect the utility hoses joining the grinding area facilities to the
handling area:
i. Disconnect the 1-inch drain from the bottom of the plenum.
ii. Unclamp the retaining ring of the 5-inch exhaust hose from the plenum.
Pull the exhaust duct hose off its connection.
h. Continue to rotate the handling section clockwise to provide access to the
grinding section of the machine.
4. Remove the horizontal bracket and probe from the probe stand:
a. Using a 3/32-in. hex key, remove the probe cord and vacuum line cover
from the side of the probe stand, freeing the lines.
b. Using a 5/16-in. hex key, remove the three 3/8-16 n-c bolts securing the
horizontal bracket by rotating them counterclockwise.
c. Remove the bracket and probe.
5. Using a 3/16 hex key, remove the 1/4-20 n-c mounting bolts from the work
chuck by rotating them counterclockwise.
6. Using two of the mounting bolts, form handles to remove the work chuck:
a. Manually reinsert two of the mounting bolts in the extra holes provided in
the side of the work chuck.
b. Rotate the two bolts clockwise.
c. Grasping both bolts, remove the work chuck.
d. Rotate the two bolts counterclockwise to remove them from the chuck.
7. Using the lint-free wipes and D.I. water, clean and dry the mounting plate.
8. Mount the new chuck onto the mounting plate:
a. Set the chuck in place.
b. Reinsert the mounting bolts in their standard positions, finger-tight.
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