Chuck Vacuum Checking
If vacuum ever fails when a wafer is on a turning chuck during the Auto grinding, the grinding process will
be terminated. This now includes the halt mode.
Miscellaneous
Increase manual Z axis travel 10 times to facilitate moving large distances. Increase Chuck RPM limit to 700
RPM. To increase chuck RPM beyond 600 RPM, the software limit must be increased to 30,000 counts per
second on the servo control card. If you need to increase the chuck RPM above 600 RPM, contact the
factory.
7AF Version 2.06 Features
9/5/96 Ken Hill
Purpose
Software version 2.06 for the model 7AF is a release that incorporates one FloPro change for a specific
customer. The only change to other code is to report the correct version. This software must use Robot
Macros, version 2.04!
Correction to insure two wafer batch will process on both chucks
There has a timing sensitivity on starting the machine with only two wafers that can cause both wafers to be
processed on the right chuck. This was unacceptable to one of our customers, so this has been corrected in
version 2.06 by changing a flow chart.
7AF Version 3.00 Features
12/16/96 Ken Hill
Purpose
Software version 3.00 for the model 7AF contains major revisions for new features, bug fixes and includes
GEM interface capability. There are also changes in the FloPro flow charts to support these new features.
New FloPro runtime software, version 2.776, will be automatically installed. New screen files (.GRS) must
be used and are automatically installed. This software must use Robot Macros, version 2.04!
GEM Interface Capability
If the software detects the presence of the communications card that interfaces with the auxiliary computer
(GEM PC), it will turn on the GEM status information at the top of the screen. Some features such as the
host messaging system and the GEM control screen are present, but inactive, if the GEM hardware package
is not installed. Detailed documentation of this subsystem is covered in a separate manual.
Password Security
There is now the capability to provide three levels of security and identification of operators. When Machine
Variable #53 is changed to a non-zero value, this feature is enabled. Do not set this until passwords have
been set up! You will not be able to disable this function without assistance if you do not know the
process engineering or maintenance level password! Setting the variable to zero (or leaving it at the
default value of zero) allows the machine to operate as it has in the past, without access restrictions. The
three levels of security are Operator, Process Engineer and Maintenance. A separate program,
PASS7AF.EXE, is used to maintain the password file. A fourth security level and password, supervisory
level, is only used with this program to allow passwords to be accessed and changed. Detailed instructions
are provided in a separate document.
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