Robot Macros For Picking Up Widely Varying Media Thicknesses
Two new macro files are included in the C:\EQUIPE\ directory. The RP212.MAC file is for the ESC 212
controller and the V2_05.MAC file is for the ESC 100 controller. At all chucks( effector facing down), this
macro will attempt to pick up the media with a stroke down, then retry up to 0.1 inch, “feeling” with the
vacuum switch and stopping when the media is found. This will allow more flexibility in setting the robot for
widely varying chuck or media heights. Sub-optimal set-ups may reduce throughput due to time spent
seeking the media. This change is not mandatory. The previous versions (V2_04.MAC and RP212.MAC,
6/14/97) of the macros will work.
Minor Bug Fixes
The Wafer Count reported in the Grind Data Screen is now saved when the an Auto Grind is stopped.
Previously, it was only saved on returning to the Main Screen, possibly losing count if power was turned off
before exiting to the Main Screen. An improvement was made in the reference timing to help some customers
experiencing stalls during this process. Support for GEM long integer Equipment Constants was fixed. This
could prevent loading of the correct Equipment Constants, preventing communication with the Host.
7AF Version 4.00 Features
11/26/97 Ken Hill
Purpose
Software version 4.00 for the model 7AF is primarily to implement Delta Grinding and to provide probe
averaging for in-situ grinding support. If upgraded from a version before v3.00, new FloPro runtime
software, version 2.776, will be automatically installed. Likewise, new screen files (.GRS) may be used and
are automatically installed. This software must use Robot Macros, V2_04.MAC or above for ESC 100
controllers (version 2.05 included) and RP212.MAC for ESC 212 controllers! New macros, as described
below are included in this release.
Delta Grinding
Delta Grinding will remove the specified amount of material in the recipe, similar to chuck dressing recipes.
This feature is implemented by changing the machine variable, Delta Grind (0 = Off) (variable 84) to one.
Leaving variable 84 at its default value of zero will continue operation in thickness target mode. To support
this feature, all data in the grind recipe will now display a decimal point and tenths if the number is less than
100 and no decimal point if the number is greater than or equal to 100. All thickness and lift entries can now
include a decimal point, however display of the number is limited by the previously mentioned rules.
Probe Averaging
The 7AF will now average the probe readings for the number of revolutions in Dress Probe Avg Revs
(variable 95) for dress operations (including in-situ) and Grind Probe Avg Revs (variable 96) for grinding.
The default value of 0 will use the instantaneous reading, the same as operation as in previous releases. The
number of revolutions can have a fractional component. For example, it is acceptable to have averaging of
0.1 revolutions or 2.5, if desired.
It is very important to note that probe readings will be delayed by the time it takes to do an average. If
average revolutions is set to 1.0 at 20 RPM, each probe reading will take 3 seconds! In the previous
example, probe readings will be more stable, but the target trip point will be delayed for 0 to 3 seconds. This
uncertainty can lead to uncertain target trip points. The lower the feed rate, the less affect this will have. Be
sure to consider this variable lag in selecting the number averaging revolutions to use.
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