Throughout the entire grind/polish step, the thickness is being monitored. If the thickness is reduced by more
than the Machine Variable Polish Removal Limit (variable 73), the grind will move immediately to the dwell
step. Because the default value of Polish Removal Limit (variable 73) is 0.0, it must be set prior to fine
grinding in AlTiC mode! Otherwise, a near “air grind” is implemented, meaning that the wafer may be
touched, but little to no material will be removed.
Turrets Seated on Power-up
NEVER manually rotate turrets unless instructed to do so by the software!
The software will now attempt to hold the turrets in place by activating the appropriate controls on power-
up. If it cannot determine the correct control to activate, a fault (alarm) will be activated. This fault will
instruct the operator to “Hand Close Turrets.” Upon sensing the correct position, the controls will be
activated and the turret held in place.
Other Features
There is now a message instructing the operator to remove the dressing pad after dressing a wheel.
Alarms have been added to latch conditions and help in diagnosing “Grind Abort” faults. Specifically, the
“Right and Left Vacuum Abort” and “Service Panel Abort” are now implemented.
Robot Macros
There are two new macro sets for the ESC212 controller. The upgrade to the RP212.MAC macro set adds
more ability to reach wafers below the end effector on the chucks. It can now move more than 0.1” in
searching for the wafer. The SQ212.MAC macro set has been generated to align square wafers. The
Firmware must be version 4.46IMI in order for these macros to work. The ability to align round wafers has
been preserved for manual operation from the EQT software. The round align macro name is “RALIGN”
and is only available manually. The correct macro set must be chosen for the material being ground. Only one
type, round or square, is supported.
7AF Version 4.02 Features
5/14/98 Ken Hill
Purpose
Software version 4.02 for the model 7AF is primarily to implement features for AlTiC and alternative
materials Grinding. If upgraded from a version before v3.00, new FloPro runtime software, version 2.776,
will be automatically installed. Likewise, new screen files (.GRS) may be used and are automatically
installed. This software must use Robot Macros, V2_04.MAC or above for ESC 100 controllers (version
2.05 included) and RP212.MAC for ESC 212 controllers! For square media, new macros, SQ212.MAC, are
included for the ESC212 controller. The new macros, described below, are included in this release.
Hardware Work and Spin Chuck Homing
Homing for the work and spin chucks operates differently now. The position is only set when a “Home All”
is performed in the Home Screen. Hardware home sensors are now supported. The spin chuck always
includes this hardware and will therefore position to the same place in all cases, using the hardware index as a
reference. The work chucks will check for a home index (hardware must be installed) and use this for a
reference, if available. If the hardware is not detected, the chuck will be left in the same position as it entered
the Home Screen and this will be used as the home position. Note that for machines without home index
hardware, the chuck position can still be changed by manually positioning the chuck in the Main Menu and
then doing a “Home All” in the Home Screen.
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