STRASBAUGH CONFIDENTIAL INFORMATION
3
Grind Chucks Every x Wafers
The recipe for work chuck dress/true has an entry labeled “Grind Chuck Every x Wafers. A value such as 100 in
that field will provoke a message on the screen after grinding 100 wafers, as a reminder that it is time to dress
the chuck(s). Dressing either or both work chucks will satisfy the message and will reset the counter so that the
message will appear again after the next 100 wafers. The value zero in that field will prevent such a reminder
from ever displaying.
Spin Station Air Dry
The spin station can now make use of an air blower to assist in drying the wafer and, later, drying itself. For this
to work properly, a small hose must be installed in the spin station to aim the air flow. If you do not have the
hose installed, or if you prefer not to use the air blower, you may set a machine variable to turn off the air.
When the spin station dries itself it will optionally raise the lid so it can make use of the air blower. Set variable
45, Spin Station Options as follows. The value 1 raises the lid when the spin station dries itself. The value 10
allows use of the air blower. Adding these, the value 11 turns both options on.
Warnings With Automatic Download of Robot Coordinates
If some of your grinding recipes make use of the automatic download feature but others do not, there is a
potential for wafer damage. By selecting a recipe that does not download coordinates, you will be using
whatever coordinates were downloaded last. But those may not be suitable for the current set of wafers.
To help identify and correct this situation, two warnings are added.
When you cycle power or run7af, all your wafer recipes will be examined. If some use the automatic download
feature but others do not, a text message will appear on the screen before the 7AF grinder software starts
running. This will be a reminder that you need to edit some of your recipes.
When you edit a recipe, the following situation will prevent you from saving your edit: There is at least one
robot coordinate file in the execode directory, enabling the Robot Co-ords button, but this recipe does not name
a robot coordinate file. In order to save your edit, you must name a robot coordinate file in this recipe.
If all or none of your recipes use the download feature, neither of these messages will appear. The only
danger is when some use the download feature and others do not.
Warning Before Referencing and Grinding
When you request reference (or home and reference) the wafer diameter from the DEFAULTO recipe will be
displayed and you will be asked to confirm that this is the diameter of your reference wafer(s). When you start a
new grind cycle, this same message will appear, showing the wafer diameter from your grinding recipe. The
message will not appear if grind starts under remote control through GEM.
New Alarm Messages
During Home and Reference, certain error conditions used to produce a display like “ERR109” on the screen
together with a fault message “CZ,FZ Servo Error.” When the display “ERR109” appeared on the CZ icon, the
fault message did not really provide any new information, and the meaning of 109 was unreported. In the new
software, “ERR109” will still appear, but the fault message will be more descriptive. For 109, it will say “Servo
Following Error.” GEM will also see these new alarm messages.
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