DRAWING CROSS REFERENCE INDEX FOR nTellect (Model 7AF)
DRAWING #
DESCRIPTION DRAWING #
DESCRIPTION
118168 A1 L MAIN MACHINE ASSEMBLY 224014 A4 U UPPER SPINDLE ASSEMBLY
118168 A2 L FOOT PRINT 224014 E1 D JUNCTION BOX ASSEMBLY
118168 E0 U CONTROL LAYOUT 224015 A1 H LOWER SPINDLE ASSEMBLY
118168 E1 T ELECTRICAL SCHEMATIC 224015 A2 H LOWER SPINDLE ASSEMBLY
118168 E2 H ELECTRICAL SCHEMATIC INPUTS 1-32 224016 A1 K GRIND PAN ASSEMBLY
118168 E3 B ELECTRICAL SCHEMATIC INPUTS 33-64 224017 A1 B CONDITIONING ARM ASSEMBLY
118168 E4 C ELECTRICAL SCHEMATIC OUTPUTS 1-32 224018 A1 E PROBE ASSEMBLY
118168 E5 B ELECTRICAL SCHEMATIC OUTPUTS 33-64 224019 A1 J ROBOT ASSEMBLY
118168 E6 E ELECTRICAL SCHEM. ANALOG CHANNELS 224020 A1 G FRONT WINDOW ASSEMBLY
118168 E7 B ELECTRICAL SCHEMATIC (AXIS 1 & 2) 224023 A1 E CASSETTE TURRET ASSEMBLY
118168 E8 C ELECTRICAL SCHEMATIC (AXIS 3 & 6) 224024 A1 H RINSE/SPIN ASSEMBLY
118168 E9 B ELECTRICAL SCHEMATIC (AXIS 7 & 8) 224024 A2 H RINSE/SPIN ASSEMBLY
118168 EA B ELECTRICAL SCHEMATIC SERVO LIMITS 224024 A3 H RINSE/SPIN ASSEMBLY
118168 EB E ELECTRICAL SCHEMATIC 224025 A1 K PULL-OUT TRAY, COMPUTER
118168 EC A ELECTRICAL SCHEMATIC 224027 A1 B CONTROLLER PULL-OUT TRAY
118168 F1 J D.I. WATER AND VACUUM DIAGRAM 224029 A1 G WORKCHUCK MOUNTING ASSEMBLY
118168 P1 E PNEUMATIC AND COOLING WATER 224031 A1 - SPINDLE ALIGNMENT TOOL
118168 P2 B PNEUMATIC DIAGRAM 224035 A1 F ASSY. PANEL, ELEC, WAFER HANDLING
118168 P3 C PNEUMATIC DIAGRAM 224036 A1 G WAFER HANDLING PANEL ASSEMBLY
118168 P4 C PNEUMATIC DIAGRAM 224037 A1 A DRAIN ASSEMBLY
118168 T1 E 7-AF TREE 224038 A1 N ASSEMBLY VALVE PANEL
141719 A1 E ROBOT I/O WIRING BOARD ASSY. 224039 A1 G ASSEMBLY VALVE PANEL
224001 A1 L GRIND SECTION ASSEMBLY 224040 A1 - SPIN/RINSE SPLASH PAN ASSY.
224002 A1 N GRIND SECT. WAFER HANDLING ASSY. 224042 A1 B C. E. MACHINE MODIFICATIONS
224004 A1 M BOTTOM GRIND SECTION ASSEMBLY 224042 E1 F ELECTRICAL SCHEMATIC (AC)
224004 A2 M6 ptBOTTOM GRIND SECTION ASSEMBLY 248099 A1 B BACK/EXTERNAL (TOP) FLUSH KIT
224004 A3 M6 ptBOTTOM GRIND SECTION 248202 A1 B END EFFECTOR ASSY, THIN WAFER
224004 A4 M6 ptBOTTOM CABINET ASSEMBLY 248212 A1 A END EFFECTOR ASSY, SMALL
224004 E1 F JUNCTION BOX ASSEMBLY 248213 A1 A END EFFECTOR ASSY, LARGE
224005 A1 L TOP GRIND SECTION 248248 A1 A END EFFECTOR ASSY, SI SEAL
224005 A2 L TOP GRIND SECTION 248249 A1 A END EFFCTR ASSY, SI SEAL, CLR ANOD
224005 E1 A STATUS LIGHT JUNCTION BOX 248257 A1 B SPIN/RINSE CHUCK, THIN WAFER
224006 A1 AA ELECTRICAL CONTROL BOX ASSEMBLY 248271 A1 A CUSTMR SUP RESRV PSI CONN KIT
224006 A2 AA TERMINAL STRIPS FOR CONTROL BOX 248300 A1 A END EFFECTOR ASSY, 2.75 DIA. W/ INSERT
224007 A1 A TOP COVER ASSEMBLY 248314 A1 B GEM PC ASSEMBLY (OPTION)
224009 A1 M MONITOR EXTENSION ARM 265679 A1 A MINOR FLAT SENSOR ASSEMBLY (OPTION)
224013 A1 K BED ASSEMBLY 273819 A1 B CABLE ASSY, END EFFECTOR
224013 E1 C TERMINAL STRIP TS14 287196 E1 A TERM. +5VDC CONTROL RETRO.
224014 A1 U UPPER SPINDLE ASSEMBLY 304527 A1 B ERGONOMIC UPGRADE KIT
224014 A2 U UPPER SPINDLE ASSEMBLY 304570 A1 A MICROMOTOR LUBRICATOR KIT
224014 A3 U UPPER SPINDLE ASSEMBLY
7AF-0561004 Prepared by Technical Publications -06/20/2005
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