Strasbaugh nTellect (Model 7AF) Wafer Grinder
3 - 10 Version 1.2 - June 2004
Doors 1 and 2, (1) (2), provide access to the Send 1 and Send 2 cassette turrets.
The pre-aligner, left work chuck, left measurement probe, and left conditioning arm
are accessed through Door 5 (3).
Door 7 (4) permits access to the back of the control computer, turrets, spin station,
and robot solenoid valves.
Access the left upper (coarse) spindle through Door 12 (6).
Door 13 (7) provides access to the left side spindle drive mechanisms, the left work
chuck, and the coarse diamond wheel. (The interior plexiglass door slides out for
access to the coarse diamond wheel.)
Door 14 (8) provides access to the left lower (work) spindle, vacuum, air blowoff, and
D. I. water backflush as well as D. I. coolant water for the left and right work spindles.
The flow controls for cooling water for the four spindles, the manifold valves for the
left and right conditioning arms, and the left and right inflatable seals are also serviced
through Door 14.
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