Strasbaugh nTellect (Model 7AF) Wafer Grinder
3 - 12 Version 1.2 - June 2004
Doors 3 and 4, (1) (2), provide access to the Receive 2 and Receive 1 cassette turrets.
The spin-rinse station, right work chuck, right measurement probe, and right
conditioning arm are accessed through Door 6 (3).
Door 10 (4) permits access to the back of the controllers for the robot and the pre-
aligner which are mounted on a pullout tray, and to the spin-rinse station mechanics.
Access to the right upper (fine) spindle and the sprayer are through Door 15 (6).
Door 16 (7) provides access to the bridge side to side drive mechanism, the right side
spindle drive mechanisms, the right work chuck, and the fine diamond wheel. (The
interior plexiglass door slides out for access to the diamond wheel.)
Door 17 (8) provides access to the right (work) lower spindle and the right
conditioning arm. The 3KVA transformer supplying power to the servo amplifiers and
the right inflatable seal are also serviced through Door 17.
To Next Page
Loading...
