xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 2 Strasbaugh Time: 11:57:31
Parent: 118168 MODEL 7AF AUTOMATIC WAFER BACK GRINDING>
Drawing: 7AF-118168A1-T1 > Rev: L
Type: ASSY-FG Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
102079 10.00 FT TUBING,POLYURE,MP-1485,1 /4ODx1/8ID RM-T&W N/A
115203 50.00 FT TUBING,LUBE,SYS.,#5N25, NYLON RM-T&W
218793 70.00 FT TUBING,TEF,PFA,1/2", .062WALL,E RM-T&W
218796 100.00 FT TUBING,1/4ID X 3/8OD P LYETH. -GR RM-T&W
218797 100.00 FT TUBING,1/4ID X 3/8OD P LYETH. -YE RM-T&W
218798 250.00 FT TUBING,POLYETHYLENE,1/2 ODx3/8ID,R RM-T&W
218799 100.00 FT TUBING,1/4ID X 3/8OD P LYETH. - R RM-T&W
218800 300.00 FT TUBING,.17ID X 1/4OD P LYETH. - R RM-T&W
218801 70.00 FT TUBING,1/16ID X 1/80D OLYUR.- RE RM-T&W
218802 100.00 FT TUBING,3/8ID X 1/2OD P LYETH. - B RM-T&W
218803 1.00 FT TUBING,1/16ID X 1/8OD OLYUR. - B RM-T&W
218804 100.00 FT TUBING,PU,1/8IDx1/4OD, -RED RM-T&W MFG DOC-E
218805 100.00 FT TUBING,.17ID X 1/4OD P LYETH. - B RM-T&W
218812 100.00 FT TUBING,1/4ID X 3/80D P LYETH. - B RM-T&W
218813 100.00 FT TUBING,1/8ID X 1/4OD P LYUR. - BL RM-T&W
219610 30.00 FT TUBING,TEF,PFA 1/4",.047 WALL RM-T&W
219627 50.00 FT TUBING,TEF,PFA 3/8",.062 WALL RM-T&W
224001 1.00 EA 7AF,ASSY,GRIND SECTION ASSY-SUB 7AF-224001A1
224002 1.00 EA 7AF,ASSY,WAFER HANDLING SECTION ASSY-SUB 7AF-224002A1
224031 1.00 EA 7AF,ASSY,WORKCHUCK LEVELING K KIT-TOOL 7AF-224031A1
224232 100.00 FT TUBING,1/4"OD,X,0.17ID GREEN RM-T&W
224233 100.00 FT TUBING,1/4"OD,X,0.17ID YELLOW RM-T&W
236981 1.00 EA 7AF,BRKT,SHIPPING, BRIDGE FAB-SHMT 7AF-236981D1
236985 2.00 EA 7AF,BRKT,SHIPPING, HANDLING S FAB-SHMT 7AF-236985D1
236986 2.00 EA 7AF,BRKT,SHIPPING, LOWER GRIN FAB-SHMT 7AF-236986D1