xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 31 Strasbaugh Time: 11:57:32
Parent: 223258 7AF,ASSY,METAL CASSETTE FOR 6" WAFERS >
Drawing: Rev:
Type: ASSY-SUB Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
112790 8.00 EA SCREW,SS,6-32x3/8,SHCS CS-HDW-E N/A
223255 2.00 EA 7AF,CASSETTE,SIDE,META SPECIAL FO FAB-MISC 7AF-223255
223256 1.00 EA 7AF,CASSETTE,TOP,METAL- SPECIAL FO FAB-MISC 7AF-223256
223257 1.00 EA 7AF,CASSETTE,BOTTOM, METAL-SPEC FAB-MISC 7AF-223257
274701 24.00 IN TEFLON,1/4 DIA RM-T&W CUT TO FIT GROOVE 07/11/96
278012 24.00 IN TEFLON,RD,3/16"DIA RM CUT TO FIT GROOVES & PRE
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