xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 53 Strasbaugh Time: 11:57:33
Parent: 224002 7AF,ASSY,WAFER HANDLING SECTION
Drawing: 7AF-224002A1 Rev: K
Type: ASSY-SUB Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
107339 1.00 EA ROBOT,TERMINAL,TEACH,E UIPE TTR-1 CS-ELEC 04/17/97
107340 1.00 EA PRE-ALIGNER,EQUIPE PRE 101 CS-ELEC 04/17/97
107523 1.00 EA SWITCH,INTRLCK,MICROSWCH 22AC2, W/4 CS-ELEC NONE
108365 1.00 EA CAM FOLLOWER,S40L RBC CS-MECH
112356 2.00 EA SCREW,SS,8-32x1/4,BHCS CS-HDW-E N/A
112558 2.00 EA SCREW,1/2-13x4,HHCS,PLTD CS-HDW-E
112561 2.00 EA SCREW,SS,1/2-13x5,HHCS, PLN,TAP,PL CS-HDW-E
113219 4.00 EA SCREW,3/8-16x1-1/4,SET SH CUP PT CS-HDW-E N/A
113224 2.00 EA SCREW,3/8-16x2,SET SH CUP PT CS-HDW-E
113535 4.00 EA COTTER PIN,1/8 X 1" CS-HDW-E
113745 6.00 EA NUT,AS,HEX,1/2-13,PLTD CS-MISC
113779 4.00 EA NUT,AS,JAM,3/8-16,PLTD CS-MISC N/A
113868 6.00 EA WSHR,AS,AIRCRFT,1/4"THIN AN960-416L CS-HDW
113874 4.00 EA WSHR,ANILLO,AIRCRFT,3/8, AN960-616 CS-HDW-E
113877 4.00 EA WSHR,AS,AIRCRFT,1/2"-REG AN960-816 CS-HDW-E N/A
113939 4.00 EA WSHR,AS,FLAT,1/2",PLTD CS-HDW-E
114850 4.00 EA DOOR STOP,#9540K11, CS-MISC
172263 4.00 EA LATCH,FLUSH,62-43-301- CS-MECH
172264 4.00 EA LATCH,FLUSH 62-43-32 CS-MECH 02/29/96
218399 1.00 EA 7AF,DRIP PAN (FRONT FOR ROBOT) FAB-SHMT 7AF-218399
218438 4.00 EA 7AF,FRAME,WINDOW CASSETTE FAB-MACH 7AF-218438D1
218654 1.00 EA 7AF,SUPPORT,VERTICAL L . FAB-MISC 7AF-218654D1
218655 1.00 EA 7AF,SUPPORT,VERTICAL R . FAB-MISC 7AF-218655D1
218656 1.00 EA 7AF,SUPPORT,HORIZONTAL WINDOW FAB-MACH 7AF-218656D1
218829 1.00 EA SW,INTRLCK,MICROSW,> 22AC2 NO P CS-ELEC 12/31/96
218836 4.00 EA WHEEL,POLYURETHANE 3" IA X 2" 90 CS-MISC
224019 1.00 EA 7AF,ASSY,ROBOT ASSY-SUB 7AF-224019A1
224020 1.00 EA 7AF,ASSY,FRONT WINDOW ASSY-SUB 7AF-224020A1
224023 4.00 EA 7AF,ASSY,CASSETTE TURRET ASSY-SUB 7AF-224023A1
224024 1.00 EA 7AF,ASSY,SPIN/RINSE ASSY-SUB 7AF-224024A1-A3
224025 1.00 EA 7AF,ASSY,PULL OUT TRAY,COMPU ASSY-SUB 7AF-224025A1
224027 1.00 EA 7AF,ASSY,CONTROLLER PULL-OUT T ASSY-SUB 7AF-224027A1
224035 1.00 EA 7AF,ASSY,PANEL,(WAFER, HANDLING,S ASSY-SUB 7AF-224035A1,S1
224036 1.00 EA 7AF,ASSY,PANEL, WAFER HAND ASSY-SUB 7AF-224036A1
224039 1.00 EA 7AF,ASSY,PANEL,(WAFER, HANDLING,S ASSY-SUB 7AF-224039A1
224139 4.00 EA 7AF,FRONT,DOOR,STOP FAB-MACH 7AF-224139D1
224141 2.00 EA 7AF,PROTECTOR,BOLT HEAD FAB-SHMT 7AF-224141D1
224145 1.00 EA 7AF,WELDMENT,CABINET, FRONT FAB-MISC 7AF-224145W1-W9
224146 1.00 EA 7AF,COVER,FRONT CABINET FAB-SHMT 7AF-224146W1-W2
224147 1.00 EA 7AF,BRACKET,FRONT,CABINE T,LIFT FAB-WELD 7AF-224147D1
224148 1.00 EA 7AF,NUT,FRONT,CABINET,LI FT FAB-MACH 7AF-224147D1
224149 2.00 EA 7AF,BRACKET,FRONT,CASTER FAB-SHMT 7AF-224149D2
224150 2.00 EA 7AF,PIVOT BAR,FRONT CA TER FAB-MACH 7AF-224149D2
224151 2.00 EA 7AF,AXLE,FRONT,CASTER FAB-MACH 7AF-224151D1
224250 4.00 EA NUT,AS,HVY HEX,3/8-16, SEE TEXT CS-MISC
224292 1.00 EA 7AF,DOOR,FRONT RIGHT > FAB-WELD 7AF-224292D1,W1
224293 1.00 EA 7AF,DOOR,FRONT LEFT (HRS ) > FAB-WELD 7AF-224293D1,W1
224294 1.00 EA 7AF,DOOR,SIDE RIGHT (HRS ) > FAB-WELD 7AF-224294D1,W1
224295 1.00 EA 7AF,DOOR,SIDE LEFT FAB-WELD 7AF-224295D1,W1
240103 2.00 EA WSHR,AS,2x2x1/4 W 7/1 6 DIA HOLE, CS-HDW-E
241905 5.00 EA LABEL,"CAUTION PINCH POI NTS/HANDS CS-MISC
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