Strasbaugh nTellect 7AF - Page 110

Strasbaugh nTellect (Model 7AF) Wafer Grinder
5 - 2 Version 1.2 - June 2004
CONTROL SYSTEM DESCRIPTION
Control Computer 3
Servo Control 3
Servo Amplifier 5
I/O and Interface System 6
Robot and Controller 7
Pre-Aligner and Controller 7
Digital Measurement Probes 8