xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 328 Strasbaugh Time: 11:57:38
Parent: 248257 7AF,CHUCK,SPIN/RINSE, THIN WAFER
Drawing: 7AF-248257A1 Rev: A
Type: ASSY-MSC Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
248074 1.00 EA 7AF,SPIN/RINSE CHUCK,4" FAB-MACH 7AF-248074D1
248241 1.00 EA 7AF,INSERT,200.5MM, SPIN/RINSE FAB-MISC 7AF-248241D1
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