Strasbaugh nTellect 7AF - Page 1117

xxfsassy.p c+ 15.3.9 Field Service Assy BOM Date: 08/09/01
Page: 329 Strasbaugh Time: 11:57:38
Parent: 248258 7AF,KIT,THIN WAFER HANDLING
Drawing: 7AF-248258R1 Rev: A
Type: KIT-UPGD Group: 400
Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff
------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- --------
223298 1.00 EA 7AF,SEAL,LIP,LARGE END EFFECT CS-MECH 7AF-223298D1
248202 1.00 EA 7AF,ASSY,END EFFECTOR, THIN WAFER ASSY-SUB 7AF-248202A1
248211 1.00 EA 7AF,SOFTWARE,LOCK KEY, "NO FLIP" SOFT MPP340
248241 1.00 EA 7AF,INSERT,200.5MM, SPIN/RINSE FAB-MISC 7AF-248241D1
248257 1.00 EA 7AF,CHUCK,SPIN/RINSE, THIN WAFER ASSY-MSC 7AF-248257A1