Strasbaugh nTellect (Model 7AF) Wafer Grinder
5 - 4 Version 1.2 - June 2004
The servo motors are labeled axis 1 through 8. The table below shows the motion
provided by each:
Axis Label
Motion Provided
1
bridge side to side motion
2
coarse grind wheel up/down
3
fine grind wheel up/down
4
coarse grind spindle rotation
5
fine grind spindle rotation
6
left work chuck rotation
7
right work chuck rotation
8
spin rinse chuck rotation
Each motor is individually programmed for velocity, acceleration, and position.
Instructions for motion of each servo motor originate from the main program of the
control computer. The instructions are received by the servo controller card through a
communications bus on the motherboard. Each of the servo channels interprets the
computer's digital instructions and outputs an analog velocity command signal to the
eight motors' amplifier modules. All eight axes use optical encoder feedback. This
system forms a complete closed loop servo motion control system.
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