Strasbaugh nTellect (Model 7AF) Wafer Grinder
7 - 6 Version 1.2 - June 2004
WATER SYSTEM
The water system is comprised of two subsystems, D.I. (deionized water) and
municipal or temperature-controlled water, all detailed on the engineering drawings
labeled 118168F_ (fluids). Refer also to the Pneumatic Adjustments chapter of this
manual for details on water use and related valve panels.
In the grinding area, D.I. water (deionized water) is used to supply water to the left
and right work chucks. In the handling area, D.I. water is supplied to the spin-rinse
station.
The inhouse D.I. water supply enters at the rear of the machine where it is distributed
via a manifold and 1/2-in. tubing throughout the rest of the machine.
The municipal or temperature-controlled water supply enters the machine at the rear;
it is then routed to a manifold where it is used to cool the motors of the four air
bearing spindles. Green tubing carries the cooling water in; yellow tubing carries the
cooling water out.
Note: When monitoring spindle coolant IN and/or OUT pressures with a flow switch,
the system should be setup with a minimum 15 psi difference between the
incoming and outgoing spindle coolant pressures. The outgoing spindle
coolant pressure will always be LESS than the incoming spindle coolant
pressure.
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