Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 11
Reference
Probes
Left
Both
Right
Measure-
ment
Cancel
Touch the Reference Probes button to display the Reference Probes
submenu, shown immediately below, at which you may select the
probe(s) to reference. Note that referencing the probes zeros them
on the work chucks.
Touch the Left button to reference the left probe.
Touch the Both button to reference both probes.
Touch the Right button to reference the right probe.
Touch the Measurement button to move the probes down to
measure the thickness of the items resting on the work chucks.
The probe measurement values are shown in the status display
boxes at the right side of the menu screen. Raise the probes by
touching the Measurement button again (toggling the
Measurement button).
Before measuring, always reference the probes. Note that the
probes are automatically referenced during machine homing.
Touch the Cancel button to close the Reference Probes submenu.
Help
Touch the Help button to display information on making
selections at the Home Machine menu.
Send 1, Send
2, Receive 1,
Receive 2
Cassette
Turrets
Touch the Cassette Turret icons to rotate the cassette turrets 180 °,
presenting the wafer cassettes either to the robot or to the operator.
Information Available at the Home Machine Menu
The Status Display Area
The real time status display, located at the right side of the Home Machine, Grind
Cycle, Dress Cycle, and Machine Maintenance menu screens, monitors machine
component position and function values continuously while machine power is on. The
information provided is detailed in the table below.
To Next Page
Loading...
