Strasbaugh nTellect 7AF - Page 1433

STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 i
Strasbaugh Confidential
i
1. Table of Contents
1. TABLE OF CONTENTS.............................................................................................................................I
2. LIST OF ILLUSTRATIONS.................................................................................................................. VII
3. INTRODUCTION.................................................................................................................................... 3-1
3.1 SECS STANDARD................................................................................................................................ 3-1
3.2 SECS-I CLARIFICATIONS .................................................................................................................... 3-1
3.2.1 Physical Connection................................................................................................................. 3-1
3.2.2 SECS-I Blocks Transmitted ..................................................................................................... 3-1
3.2.3 SECS-I Blocks Received ........................................................................................................... 3-2
3.2.4 Interleaved Blocks .................................................................................................................... 3-2
3.2.5 Simultaneous Transactions ..................................................................................................... 3-2
3.3 SECS-II CLARIFICATIONS................................................................................................................... 3-2
3.3.1 Data Format Types................................................................................................................... 3-2
3.3.2 Data Item Length Bytes............................................................................................................ 3-2
3.3.3 ASCII Data ................................................................................................................................ 3-2
3.3.4 Multi-Block Messages.............................................................................................................. 3-3
3.3.5 Function Zero ........................................................................................................................... 3-3
3.4 GEM STANDARD ................................................................................................................................ 3-3
3.5 GEM COMPLIANCE ............................................................................................................................ 3-3
3.6 SEMI E10 STANDARD........................................................................................................................ 3-5
3.7 SECS/GEM CONFIGURATION............................................................................................................ 3-5
3.7.1 SECS-I Parameters................................................................................................................... 3-5
3.7.2 GEM Configuration ................................................................................................................. 3-6
3.8 TERMINOLOGY.................................................................................................................................... 3-7
3.9 STATE DIAGRAMS................................................................................................................................ 3-7
3.10 MODIFYING EQUIPMENT CONSTANTS FROM THE 7AF CONSOLE ...................................................... 3-8
4. MESSAGE SUMMARY......................................................................................................................... 4-1
4.1 HOST TO EQUIPMENT.......................................................................................................................... 4-1
4.2 EQUIPMENT TO HOST.......................................................................................................................... 4-2
5. OPERATING CHARACTERISTICS................................................................................................... 5-1
5.1 COMMUNICATIONS STATES................................................................................................................. 5-1
5.1.1 Communications Finite State Description ............................................................................. 5-1
5.1.2 Power Up................................................................................................................................... 5-4
5.1.3 Related Variables ..................................................................................................................... 5-4
5.1.4 Compatibility ............................................................................................................................ 5-5
5.2 CONTROL STATES................................................................................................................................ 5-5
5.2.1 Control Finite State Description............................................................................................. 5-5
5.2.2 Power Up................................................................................................................................... 5-9
5.2.3 Related Variables ..................................................................................................................... 5-9
5.2.4 Related Events........................................................................................................................... 5-9
5.3 PROCESS STATES................................................................................................................................. 5-9
5.3.1 Equipment State Diagram ..................................................................................................... 5-10
5.3.2 7AF Process State Diagram...................................................................................................5-13
5.3.3 7AF Process State Transitions.............................................................................................. 5-15
5.3.4 7AF Process States .................................................................................................................5-16
5.3.5 Related Variables ...................................................................................................................5-16
5.3.6 Related Collection Events...................................................................................................... 5-17
5.4 DATA COLLECTION ...........................................................................................................................5-17
5.4.1 Variables ................................................................................................................................. 5-17
5.4.2 Are You There.......................................................................................................................... 5-17