Strasbaugh nTellect 7AF - Page 1434

STRASBAUGH, INC.
ii February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
5.4.3 Host Requests Status .............................................................................................................. 5-17
5.4.4 Setting Equipment Constants ................................................................................................ 5-17
5.4.5 Event Reports .......................................................................................................................... 5-18
5.4.6 Time Driven Trace .................................................................................................................. 5-18
5.4.7 Disk Files................................................................................................................................. 5-18
5.4.8 Compatibility .......................................................................................................................... 5-18
5.4.9 Related Variables ...................................................................................................................5-19
5.4.10 Related Events.........................................................................................................................5-19
5.5 ALARM MANAGEMENT .....................................................................................................................5-19
5.5.1 Alarm States ............................................................................................................................5-19
5.5.2 Reporting................................................................................................................................. 5-19
5.5.3 Enable/Disable ....................................................................................................................... 5-19
5.5.4 Host Requests Alarm Status................................................................................................... 5-20
5.5.5 Compatibility .......................................................................................................................... 5-20
5.5.6 Related Variables ...................................................................................................................5-20
5.5.7 Related Collection Events...................................................................................................... 5-20
5.6 PROCESS PROGRAM MANAGEMENT.................................................................................................5-20
5.6.1 Equipment Management of Process Programs ...................................................................5-20
5.6.2 Host Management of Process Programs.............................................................................. 5-21
5.6.3 Related Variables ...................................................................................................................5-21
5.6.4 Related Events......................................................................................................................... 5-21
5.7 REMOTE COMMANDS........................................................................................................................5-22
5.7.1 S2F41 Commands .................................................................................................................. 5-22
5.7.2 Related Variables ................................................................................................................... 5-24
5.7.3 Related Events......................................................................................................................... 5-25
5.7.4 Remote Grinding Operations ................................................................................................ 5-25
5.7.5 Setting Process Program and Lot ID’s................................................................................. 5-25
5.8 MATERIAL MOVEMENT.....................................................................................................................5-26
5.8.1 Related Variables ...................................................................................................................5-29
5.8.2 Related Collection Events...................................................................................................... 5-29
5.9 EQUIPMENT TERMINAL SERVICES ....................................................................................................5-29
5.10 ERROR MESSAGES ............................................................................................................................5-30
5.11 CLOCK...............................................................................................................................................5-30
5.11.1 Related Variables ...................................................................................................................5-30
5.12 SPOOLING..........................................................................................................................................5-31
5.12.1 A Word of Caution..................................................................................................................5-31
5.12.2 Spooling Sequence .................................................................................................................5-31
5.12.3 Spooling State Transitions....................................................................................................5-35
5.12.4 Spool States.............................................................................................................................5-36
5.12.5 Related Variables ...................................................................................................................5-36
5.12.6 Related Events.........................................................................................................................5-37
5.13 LIMITS MONITORING.........................................................................................................................5-37
5.13.1 Variables Enabled for Limits Monitoring............................................................................5-37
5.13.2 Related Limits Monitoring Variables...................................................................................5-38
5.13.3 Related Events.........................................................................................................................5-38
6. SECS MESSAGE DETAIL.................................................................................................................... 6-1
6.1 SML NOTATION .................................................................................................................................. 6-1
6.2 S1F1 - ARE YOU THERE..................................................................................................................... 6-2
6.3 S1F2 - ON LINE DATA (EQUIPMENT TO HOST).................................................................................. 6-2
6.4 S1F2 - ON LINE DATA (HOST TO EQUIPMENT).................................................................................. 6-3
6.5 S1F3 - SELECTED STATUS REQUEST .................................................................................................. 6-3
6.6 S1F4 - SELECTED STATUS DATA ........................................................................................................ 6-3
6.7 S1F11 - STATUS VARIABLE NAMELIST REQUEST .............................................................................. 6-3
6.8 S1F12 - STATUS VARIABLE NAMELIST REPLY................................................................................... 6-4
6.9 S1F13 - CONNECT REQUEST.............................................................................................................. 6-4
6.10 S1F14 - CONNECT REQUEST ACKNOWLEDGE................................................................................... 6-5
6.11 S1F15 - REQUEST OFF-LINE.............................................................................................................. 6-5