Strasbaugh nTellect 7AF - Page 1444

STRASBAUGH, INC.
3-4 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
Table 2 GEM Compliance Statement
GEM COMPLIANCE STATEMENT
FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED COMPLIANT
State Models
?Yes •No
Equipment Processing States
?Yes •No
S1,F13/F14 Scenario
?Yes •No
Event Notification
?Yes •No ?Yes •No
On-line Identification
?Yes •No
Error Messages
?Yes •No
Control (Operator Initiated)
?Yes •No
Documentation
?Yes •No
ADDITIONAL CAPABILITIES IMPLEMENTED COMPLIANT
Establish Communications
?Yes •No ?Yes •No
Dynamic Event Report Configuration
?Yes •No ?Yes •No
Variable Data Collection
?Yes •No ?Yes •No
Trace Data Collection
?Yes •No ?Yes •No
Status Data Collection
?Yes •No ?Yes •No
Alarm Management
?Yes •No ?Yes •No
Remote Control
?Yes •No ?Yes •No
Equipment Constants
?Yes •No ?Yes •No
Process Program Management
?Yes •No •Yes ?No
Material Movement
?Yes •No ?Yes •No
Equipment Terminal Services
?Yes •No ?Yes •No
Clock
?Yes •No ?Yes •No
Limits Monitoring
?Yes •No ?Yes •No
Spooling
?Yes •No ?Yes •No
Control (Host Initiated)
?Yes •No ?Yes •No