Strasbaugh nTellect 7AF - Page 1445

STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 3-5
Strasbaugh Confidential
3-5
3.6 SEMI E10 Standard
The SEMI E10 Standard is another document published by SEMI. It provides a guideline for
definition and measurement of equipment reliability, availability, and maintainability (RAM).
This document defines six basic Equipment States which define how equipment time is
categorized.
The SECS Interface on the 7AF will allow the Host to determine the current E10 state. These Equipment
States are as defined in the following version of the standard:
1. E10-1992 (Section 3, Equipment States)
3.7 SECS/GEM Configuration
3.7.1 SECS-I Parameters
The Equipment provides the following SECS installation parameters, with default values shown provided at the factory:
Table 3 SECS Installation Parameters.
Parameter VID Default Description
Device ID 5 1 Specified as a value from 0 to 32767 (15 bits).
Baud Rate 4 9600 Allowable speeds are 110, 150, 300, 600, 1200, 2400, 4800,
9600, and 19200 Baud.
T1 6 0.5 Sec Inter-character timeout. Range allowed is 0.1 to 10.0 seconds,
at increments of 0.1 seconds.
T2 7 10.0 Sec Protocol timeout. Range allowed is 0.2 to 25.0 seconds, at
increments of 0.1 seconds.
T3 8 30 Sec Transaction Timeout. Range allowed is 1 to 120 seconds, at
increments of 1 second.
T4 9 45 Sec Inter-Block timeout. Range allowed is 1 to 120 seconds, at
increments of 1.
RTY 10 3 Transmit failure retry limit. Range allowed is 0 to 31, at
increments of 1.
DUPLIC 11 Off Duplicate Block Detect. May be Enabled (On) or Disabled
(Off).