STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-1
Strasbaugh Confidential
5-1
5. Operating Characteristics
This section describes the working characteristics of the 7AF. It is divided into sections, and each of these sections
describe a particular aspect of the 7AF's operating characteristics.
5.1 Communications States
The 7AF represents the current state of its SECS link using a Communication Finite State Machine diagram. See
"Communication Finite State Diagram" in paragraph 5.1. The purpose is to make clear how this link is initiated and
terminated.
5.1.1 Communications Finite State Description
The diagram on the following page explains the Communications Finite State Machine that the 7AF maintains.