Strasbaugh nTellect 7AF - Page 1456

STRASBAUGH, INC.
5-6 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
Equipment Control States
Off-Line
On-Line
Attempt
On-Line
Equipment
Off-Line
Host
Off-Line
Local Remote
C
C
C
C 4.
7.
5.
2.
1.
6.
11.
9.
10.
8.
3.
12.
13.
14.
Figure 2 Equipment Control State Diagram