STRASBAUGH, INC.
5-10 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
5.3.1 Equipment State Diagram
The Equipment State diagram is implemented in the 7AF to allow tracking of productive state similar to SEMI E10. The
following summarizes the Equipment's implementation:
The 7AF reports its state to allow the Host to determine the E10 state of the machine. Context sensitive determinations,
such as if the machine is operating on test or production lots, is left to the Host.
The following diagram and tables depict with greater detail the Equipment's use of the E10 states.
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