STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-23
Strasbaugh Confidential
5-23
S2F41 [W]
<L [2]
<A 'START'>
<L>
> .
5.7.1.2 STOP
This command will stop the processing of material at the Equipment. Wafers currently in process will not be completed,
and the process will be stopped immediately.
S2F41 [W]
<L [2]
<A 'STOP'>
<L>
> .
5.7.1.3 PAUSE
The PAUSE command will cause the 7AF to complete the processing of wafers currently in process, but not to start any
new wafers until the RESUME command has been given. The process may be aborted with the “STOP” or “ESTOP”
command.
S2F41 [W]
<L [2]
<A 'PAUSE'>
<L>
> .
5.7.1.4 RESUME
After a PAUSE command has been given, the RESUME command will continue to process new wafers according to the
recipe.
S2F41 [W]
<L [2]
<A 'RESUME'>
<L>
> .
5.7.1.5 LOCAL
While the Equipment is in Remote state, the Host can put the 7AF into Local state by sending the LOCAL command.
S2F41 [W]
<L [2]
<A 'LOCAL'>
<L>
> .
5.7.1.6 ESTOP
This command immediately stops all activity on the 7AF. Wafers in process are not moved.
S2F41 [W]
<L [2]
<A 'ESTOP'>
<L>
> .
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