STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-25
Strasbaugh Confidential
5-25
5.7.3 Related Events
The following lists the collection events (CEIDs) which are relevant to remote control. For a more complete description
of these events, see "Appendix B -- Collection Events" or the description in this chapter.
Table 22 Remote Control Related Events
Collection Event CEID
OperatorCommand 11
5.7.4 Remote Grinding Operations
To prepare the 7AF for remote control grinding of product, certain steps must be taken in order. First, the command,
BEGIN-AUTO, must be successfully executed. This will put the 7AF in Process State 2, Grind Screen Wait For Start.
This should be confirmed by checking that VID 15 is indeed equal to 2. Next, the grind process must be selected by issuing
the GRIND-TYPE command with an argument of COARSE, FINE, or DUAL. This should be confirmed by checking
that VID 27 (0 = None; 1 = Coarse; 2 = Fine; 3 = Both) matches your choice. The machine is ready to accept a PP and
material to begin. For a discussion about managing PP loading, see section 5.7.6 below. When the PP and product are
loaded, the 7AF is ready to start.
Processing is started by issuing the START command. When product is exhausted and the process is stopping (Process
State VID 15 = 20), the host should acknowledge with a STOP command. The process can be restarted with a START
command. If the 7AF stops due to a fault or intervention by the host with a STOP or ESTOP command, product can be
left in the equipment and will need to be manually unloaded. Product’s location can be checked in VID 37. Any product in
the equipment must be cleared or product will be damaged. Stopping of the process by any means other than exhausting the
product being put into the equipment should result in a careful inspection before proceeding.
The PAUSE command can be used to pause the process and allow any product being actively processed to be finished
(reference VID 38, 39). The process can be stopped with a STOP command when the Coarse and Fine Spindle Status
(VID 38, 39) has reached the Idle (-2) state. Product will not be moved and must be manually cleared. The process can be
restarted with the START command. Alternatively, the process can be restarted after all turrets have been rotated to not
allow more product into the machine. This will allow all product to be cleared automatically, with the possible processing
of one piece of product from the prealigner.
5.7.5 Setting Process Program and Lot ID’s
To set the Process Program (PP), the operator must notify the host system that material is ready to load onto the machine
before setting a cassette onto the send turret. The host will then issue a “PP-SELECT” command that contains the name of
the recipe to be used and the Lot Id of the batch to be processed. This action can be confirmed through the status received
from GEM and by generating a report to check the “Next Lot ID” (VID #25) and “Next Recipe (PP) to Use” (VID #26)
variables. The operator will then set the cassette of material (wafers) onto a send turret. When the material is received at
the turret, the “Next Lot ID” is associated with the material in the cassette and will follow them throughout the process.
This process can be visualized as the cassette and all material in it being “labeled” with the “Next Lot ID” at the time it is
put onto the send turret. Care must be taken to set the PP and Lot Id before setting the cassette of material onto a send
turret. Error detection and recovery strategies will be discussed later.
Procedure to Send the “PP-SELECT” Command: In this example, it will be assumed that the operator has requested that
the host set the Process Program by an entry at a host terminal. Given that communication has been established and the
7AF is On Line, the necessary commands can be issued. At this point the Host
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