STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-29
Strasbaugh Confidential
5-29
5.8.1 Related Variables
The following table lists the variables (SV's, EC's, or DVVALS) which are relevant to material movement. For a more
complete description of these variables, see "Appendix A -- Variables".
Table 23 Material Movement Related Variables
Variable Name VID
Send 1 Turret Status 29
Send 1 Turret Wafer Count 30
Send 2 Turret Status 31
Send 2 Turret Wafer Count 32
Receive 1 Turret Status 33
Receive 1 Turret Wafer Count 34
Receive 2 Turret Status 35
Receive 2 Turret Wafer Count 36
5.8.2 Related Collection Events
Many collection events relate directly to material movement or imply that material movement has taken place. For a more
complete listing of these collection events, please see "Appendix B -- Collection Events".
Table 2424 Material Movement Related Collection Events
Variable Name VID
Send Turret 1 state changed 23
Send Turret 1 material received
(cassette loaded)
24
Send Turret 2 state changed 25
Send Turret 2 material received
(cassette loaded)
26
Receive Turret 1 state changed 27
Receive Turret 1 material removed
(cassette unloaded)
28
Receive Turret 2 state changed 29
Receive Turret 2 material removed
(cassette unloaded)
30
5.9 Equipment Terminal Services
The 7AF supports exchange of free text messages with the Host (SECS Stream 10). This Equipment accepts the following
messages from the Host, and responds accordingly if the W-Bit is set to 1:
S10F3 /* Single Line Data */
S10F5 /* Multi-Line Data */
S10F9 /* Broadcast */
To Next Page
