Strasbaugh nTellect 7AF - Page 15

Operations and Maintenance Manual Table of Contents
Version 1.2 - June 2004 TOC - 13
Grind Wheel 21
Coarse Wheel is Down 21
Fine Wheel is Down 21
Load Cell 22
Coarse Z Load Cell 22
Fine Z Load Cell 22
Prealigner 22
Prealigner Error 22
Probes 23
Left Probe 23
Right Probe 23
Left Probe is Down 23
Right Probe is Down 23
Reference 24
Bad Reference 24
Robot Communication 24
Robot Communication 24
Service Panel: Abort 24
Service Panel: Abort 24
Servo 25
Bridge Servo 25
Coarse Z Servo 25
Fine Z Servo 25
Left Chuck Servo 25
Right Chuck Servo 26
Robot Servo 26
Spin Station Servo 26
Coarse Spindle Servo 26
Fine Spindle Servo 27
Servo Water 27
Coarse Servo H20 27
Fine Servo H20 27
LT Chuck Servo H20 27
RT Chuck Servo H20 27
Spin Station 28
Spin Chuck Up/Down 28
Spin Lid Up/Down 28
Spin Station Home 28
Thickness 28
Thickness Limit 28
Turrets 29
Hand Close Turrets 29
Vacuum 29
Aligner Vacuum (Prealigner) 29
Left Chuck Vacuum 29
Left Chuck VacAbort 29
Right Chuck Vacuum 30
Right Chuck VacAbort 30
Robot Chuck Vacuum 30
Spin Station Vacuum 30