Strasbaugh nTellect 7AF - Page 14

Strasbaugh nTellect (Model 7AF) Wafer Grinder
TOC - 12 Version 1.2 - June 2004
CHAPTER 14 - TROUBLESHOOTING
Overview 4
Messages Displayed on the Control Computer Screen Take Precedence! 4
Assumption 4
Work and Spin Chuck Homing Hardware 5
Machine Operation Checkout 6
Normal Operating Conditions and Strategies for Maintaining Them 8
Grind Force 8
Motor Current 8
Probe 8
Manual Dressing and Truing 9
Automatic Dressing and Truing 9
Visual Wafer Inspection - Identifying and Correcting Six Grind Process Problems 10
Fault Messages 14
Air Pressure (PSI) 15
Coarse Spindle PSI 15
Fine Spindle PSI 15
Left Chuck PSI 15
Right Chuck PSI 15
Cassettes 15
Cross Slot/Cassette 15
New Receive Cassette 15
New Send Cassette 15
Chucks 16
Rotational Home 16
Left Chuck Home 16
Right Chuck Home 16
Conditioning Arm Position 16
Left Condition Arm 16
Right Condition Arm 17
Coolant 17
Left Chuck Coolant 17
Right Chuck Coolant 17
Counterbalance 17
Counterbalance 17
Doors and Panels 18
Operator Door Open 18
Service Panels Open 18
Exhaust—IMPORTANT SAFETY INFORMATION! 18
Exhaust Fail 18
Force 18
Coarse Force Limit 18
Fine Force Limit 19
Grind Abort 20
Grind Abort: Unsafe! 20
Grind Seal 21
Left Grind Seal 21
Right Grind Seal 21