Strasbaugh nTellect (Model 7AF) Wafer Grinder
14 - 8 Version 1.2 - June 2004
NORMAL OPERATING CONDITIONS AND
STRATEGIES FOR MAINTAINING THEM
This section lists normal operating conditions and strategies for maintaining them as
well as the means of identifying and correcting six frequently encountered grind
process problems.
GRIND FORCE
The normal operating range for the fine wheel is 20 to 35 lbs.
The normal operating range for the coarse wheel is 25 to 45 lbs.
If the grinding force for either wheel fluctuates more than 10 lbs during grinding, the
wheel may need to be trued.
The wheels should be visually inspected for sufficient diamond (greater than 1/32-
in.). If the diamond is insufficient, replace the wheel.
If the grinding force for either wheel rises above the normal operating range for more
than few seconds, the wheel may need to be dressed. (Note that rise in the wheel
motor current will accompany the rise in the grinding force.)
MOTOR CURRENT
The normal operating range for the current draw of the grind wheel motors is 5.0 to
9.0 amps.
If the motor current rises above the normal operating current for more than a few
seconds, the wheel may need to be dressed. (Note that rise in the grind force will
accompany the rise in the motor current.)
The current does rise above the normal operating levels during acceleration and
deceleration.
PROBE
The probe fluctuation should be less than 3 microns during grinding.
If the probe fluctuation is greater than 3 microns, the run out of the work chuck
should be checked.
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